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자료 필터
자료유형
발행연도
2014 ~ 2026
2014 2026
키워드
언어
전체 208건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Recovering dielectric integrity in atomic layer etched ZrO2 MIM capacitors via post-etch annealing
- Lee, Jeongbin ;
- Oh, Jiwoo ;
- Kwon, Yongju ;
- Kim, Jung-Tae ;
- Kim, Ji Hwan ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Interfacial stabilization of ZrO2/Mo2N capacitors via ultrathin Nb2O5 insertion for scaled DRAM applications
- Jeon, Yeon-Ji ;
- Shin, Yoonchul ;
- Kim, Ji Hwan ;
- Hong, Chan-Bin ;
- Choi, Seo-Young ;
- ... Kim, Woo-Hee ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon
- 2026-10
- Surfaces and Interfaces
- Elsevier B.V.
Article
Enhancing oxide/nitride selectivity in area-selective atomic layer deposition via pyridine-catalyzed inhibition
- Oh, Jieun ;
- Kim, Woohyuk ;
- Lim, Hyeonggeun ;
- Lee, Soyoung ;
- Kim, Woo-Hee
- 2026-08
- SURFACES AND INTERFACES
- ELSEVIER
Article
Catalyzed selective atomic layer deposition of SiO2 on amorphous carbon via silicon blocking by alkyltrichlorosilane self-assembled monolayers
- Lee, Seo-Hyun ;
- Yoon, Chang Mo ;
- Lee, Jeong-Min ;
- Kim, Woo-Hee
- 2026-08
- Applied Surface Science
- ELSEVIER
Article
Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition
- Ha, Kyungryul ;
- Kim, Dong Geun ;
- Kim, Hyekyung ;
- Ahn, Ji-Hoon ;
- Kim, Woo-Hee ;
- ... Park, Tae Joo
- 2026-07
- Applied Surface Science
- ELSEVIER
Article
Atomic layer deposition of hafnium silicate thin films using a single source precursor
- Oh, Jieun ;
- Lee, Seo-Hyun ;
- Lee, Jeongbin ;
- Yoon, Chang Mo ;
- Kim, Daeyeong ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2026-07
- Applied Surface Science
- ELSEVIER
Article
Thermal atomic layer etching of copper via sequential chlorination and volatility-controlled hydration
- Lee, Jeongbin ;
- Lee, Dongjun ;
- Oh, Jiwoo ;
- Kim, Jung-Tae ;
- Oh, Jieun ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2026-06
- Materials Horizons
- ROYAL SOC CHEMISTRY
Article
Engineering switching dynamics and polarization in Hf1-xZrxO2 ferroelectric thin films via vertical compositional asymmetry
- Kim, Ji Woo ;
- Kim, Hyo-Bae ;
- Kim, Gunho ;
- Lee, Hyungseok ;
- Yoon, Chang Mo ;
- ... Kim, Woo-Hee ;
- ... Park, Tae Joo ;
- ... Ahn, Ji-Hoon
- 2026-06
- Journal of Alloys and Compounds
- ELSEVIER SCIENCE SA
2025
Conference
High-performance top-gated SnO2 thin-film transistors by defect modulation doping
- 2025-12-11