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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 41번부터 50번까지의 결과를 표시합니다.
2025
Conference
Catalyst-Assisted Low-Temperature Atomic Layer Deposition of SiO2 Films and Enhanced Film Quality via In-situ Ozone Treatment
- 2025-02-14
Conference
ALD MoOx using Novel precursor & Mechanisms of initial tetragonal ZrO2 deposition at interfaces through MoO2/MoO3 phase control
- 2025-02-14
2024
Conference
Advanced Atomic Level Patterning Process by Area Selective Atomic Layer Deposition integrating Atomic Layer Etching
- 2024-12-10
Conference
Enhanced Oxide versus Nitride Selectivity in Area-Selective Atomic Layer Deposition of SiO2 Thin Films Combining Small Molecule Inhibitors with Atomic Layer Etching
- 2024-12-10
Conference
Low-Temperature Atomic Layer Deposition of High-Quality SiO2 Films Using Catalyst and In-situ Ozone Treatment
- 2024-11-14
Conference
Thermal Atomic Layer Etching of High-k Oxides via Fluorination and Ligand-Exchange Mechanisms
- 2024-11-14
Conference
Area-Selective Atomic Layer Deposition by Chemo-Selective Inhibition of Alkyl Aldehyde Molecules on Nitride Surfaces
- 2024-10-30
Conference
Selective Metal Blocking Using Vapor-Phase Self-Assembled Monolayers for Area-Selective Atomic Layer Deposition of Dielectrics
- 2024-08-06
Article
Low-resistivity molybdenum-carbide thin films formed by thermal atomic layer deposition with pressure-assisted decomposition reaction
- Ha, Min-Ji ;
- Kang, Na-Gyeong ;
- Kim, Woo-Hee ;
- Park,Tae Joo ;
- Park, Tae-Eon ;
- ... Ahn, Ji-Hoon
- 2024-07
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS