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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 21번부터 30번까지의 결과를 표시합니다.
2026
Conference
Advanced Atomic Level Patterning Process by Area Selective Atomic Layer Deposition integrating
- 2026-01-29
Conference
Chemial Vapor Deposition of Indium-Based Metal Organic Films as an All-Dry Resist for Next- Generation EUV Lithography
- 2026-01-29
2025
Conference
High-performance top-gated SnO2 thin-film transistors by defect modulation doping
- 2025-12-11
Conference
Low-resistivity ALD MoOx Film Via Stabilization of Monoclinic Mo4O11 and MoO2 phase: Application for DRAM Capacitor Electrode
- 2025-12-10
Article
Oxidation Dynamics and Surface Chemistry of Iridium and Iridium Oxide Films Grown by Atomic Layer Deposition Using O2 and O3
- Han, Ji Won ;
- Jang, Jae Woo ;
- Harada, Ryosuke ;
- Kim, Woo-Hee ;
- Ahn, Ji-Hoon ;
- ... Park, Tae Joo
- 2025-12
- Small
- WILEY-V C H VERLAG GMBH
Conference
Enhancing Topographical Selectivity in Atomic Layer Deposition of HfO2 Thin Films for High Aspect Ratio Structures using Vapor-Dosed Surface Protector
- 2025-11-11
Conference
Enhancing Oxide/Nitride Selectivity in Area-Selective ALD via Pyridine-Catalyzed Inhibition
- 2025-11-11
Conference
Surface Inhibition of SiO2 Atomic Layer Deposition by Silane Self-Assembled Monolayers with Varying Chain Lengths
- 2025-11-11