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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 31번부터 40번까지의 결과를 표시합니다.
2025
Article
Atomic layer deposition of selective SiO2 thin films using silane self-assembled monolayers on silicon versus amorphous carbon
- Lee, Seo-Hyun ;
- Lee, Jeong-Min ;
- Oh, Jiwoo ;
- Oh, Jieun ;
- Kwon, Myeongjong ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2025-10
- Materials Letters
- ELSEVIER
Article
Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
- Lee, Jeongbin ;
- Kim, Jung-Tae ;
- Oh, Jieun ;
- Lee, Dongjun ;
- Lee, Seo-Hyun ;
- ... Kim, Woo-Hee ;
- 외 3명
- 2025-08
- Small Methods
- John Wiley and Sons Inc
Conference
Area-Selective Atomic Layer Deposition for Self-Aligned Bottom-Up Nanopatterning
- 2025-07-01
Article
Oxidation-State-Dependent Selective Atomic Layer Etching of Metal Oxides
- Lee, Jeongbin ;
- Noh, Jae-Hong ;
- Kim, Jung-Tae ;
- Lee, Dongjun ;
- Choi, Ji Hyeon ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo ;
- ... Kim, Woo-Hee ;
- 외 1명
- 2025-06
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Atomic layer etching of high-k oxide thin films using hexafluoroacetylacetone and oxygen radicals
- Lee, Jeongbin ;
- Oh, Jieun ;
- Kim, Jung-Tae ;
- Oh, Jiwoo ;
- Lee, Jeong-Min ;
- ... Kim, Woo-Hee
- 2025-06
- Chemical Engineering Journal
- ELSEVIER SCIENCE SA
Article
Area-selective atomic layer deposition of Al2O3 thin films for metal versus dielectric selectivity using vapor-dosed alkanethiols
- Lee, Jinseon ;
- Oh, Jiwoo ;
- Lee, Jeongbin ;
- Lee, Jeong-Min ;
- Kim, Hyun Gu ;
- ... Kim, Woo-Hee ;
- 외 2명
- 2025-06
- SURFACES AND INTERFACES
- ELSEVIER
Article
Selective metal passivation by vapor-dosed phosphonic acid inhibitors for area-selective atomic layer deposition of SiO2 thin films
- Lee, Jeong-Min ;
- Lee, Seo-Hyun ;
- Lee, Ji Hun ;
- Kwak, Junghun ;
- Lee, Jinhee ;
- ... Kim, Woo-Hee
- 2025-05
- NANO CONVERGENCE
- SPRINGER