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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 41번부터 50번까지의 결과를 표시합니다.
2023
Conference
Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning
- 2023-11-01
Conference
Effect of etchants and oxidizers on the Molybdenum surfaces during post-CMP cleaning process
- 2023-11-01
Conference
Contact and non-contact PVA brush conditioning during oxide and metal post-CMP cleaning
- 2023-11-01
Article
Photoelectrochemical Properties of Pulse-Reverse Electrodeposited Sb2Se3/TiO2 Nanotube Photoanodes' Controlled Sb2Se3 Overlayer
- Jo, Woohyeon ;
- Han, Seungyeon ;
- Jeong, Jaebum ;
- Kim, Taegeon ;
- Son, Min-Kyu ;
- 외 1명
- 2023-11
- Energy Technology
- WILEY-V C H VERLAG GMBH
Conference
Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
- 2023-09-12
Article
Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application
- Punathil Meethal, Ranjith ;
- Jalalzai, Palwasha ;
- Muskan ;
- Kumar, Sumit ;
- Peter, Jerome ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2023-08
- Journal of Colloid and Interface Science
- ACADEMIC PRESS INC ELSEVIER SCIENCE
Article
Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
- Kim, Dong-Gyu ;
- Vereecke, Guy ;
- Gowda, Pallavi Puttarame ;
- Wostyn, Kurt ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2023-08
- Solid State Phenomena
- Scitec Publications Ltd.
Article
Acoustic power dependent detachment of PSL particles adhered to glass surfaces by dissolved gas and anionic surfactant in an ultrasonic field
- Sahoo, Bichitra Nanda ;
- Yerriboina, Nagendra Prasad ;
- Kang, Bong-kyun ;
- Klipp, Andreas ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2023-08
- Colloids and Surfaces A: Physicochemical and Engineering Aspects
- ELSEVIER
Article
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
- Samanta, Suprakash ;
- Jin, Seungwan ;
- Lee, Chan-Hee ;
- Lee, Seong-Soo ;
- Struyf, Herbert ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2023-07
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD