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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 31번부터 40번까지의 결과를 표시합니다.
2024
Conference
Development of Physical Force-Assisted Wet Cleaning Process for Removing Highly Chemically Resistant Organic Residue
- 2024-01-26
Conference
Study on the Chemical Durability and Defect Reduction Effects of Ceramic-Based CVD CMP Conditioners
- 2024-01-26
2023
Conference
Effect of Colloidal Silica and Molybdenum Ions on PVA Brush Loading during Mo Post-CMP Cleaning
- 2023-11-21
Conference
Investigation and Characterization of Mo Surface during Mo Post-CMP Cleaning Process
- 2023-11-21
Conference
Characterization of Alkaline Cu/Ti Slurry for TSV Chemical Mechanical Planarization
- 2023-11-20
Conference
Effect of Organic Amine on Ceria Contamination for Nitride Surface During STI CMP
- 2023-11-20
Conference
A Novel Method to Evaluate the Contact Area of PVA Brushes during Post-CMP Cleaning
- 2023-11-20
Conference
A novel approach for PVA brush evaluation by contact area analysis during metal and oxide post-CMP cleaning
- 2023-11-01