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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 61번부터 70번까지의 결과를 표시합니다.
2022
Article
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
- Sahoo, Bichitra Nanda ;
- Han, So Young ;
- Kim, Hyun-Tae ;
- Ando, Keita ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2022-01
- Ultrasonics Sonochemistry
- ELSEVIER
2021
Conference
An Analysis Method of the Wetting Characteristic of High Aspect Ratio Structure
- 2021-06-10
Article
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Han, So-Young ;
- Han, Kwang-Min ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2021-04
- Applied Surface Science
- ELSEVIER
Article
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Han, So Young ;
- Kim, Tae Gon ;
- Mahadev, Niraj ;
- ... Park, Jin-Goo
- 2021-03
- Microelectronic Engineering
- ELSEVIER
Article
Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- An, Kook-Hyun ;
- Kim, Dong-Gyu ;
- Kim, Hyun-Tae ;
- Yerriboina, Nagendra Prasad ;
- KIM, TAE GON ;
- ... Park, Jin Goo
- 2021-02
- Solid State Phenomena
- Scitec Publications Ltd.
2020
Article
Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process
- Han, Kwang-Min ;
- Han, So-Young ;
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2020-12
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
Effect of particle Agglomeration by Air bubble during Tungsten (W) CMP Process
- 2020-11-19
Article
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
- Lee, Jung-Hwan ;
- Poddar, Maneesh Kumar ;
- Han, Kwang-Min ;
- Ryu, Heon-Yul ;
- Yerriboina, Nagendra Prasad ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2020-10
- Polymer Testing
- ELSEVIER SCI LTD