상세 보기
자료 필터
자료유형
발행연도
2005 ~ 2026
2005 2026
키워드
언어
전체 102건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Role of brush properties and pH on Cu ion-induced silica loading to polyvinyl acetal brushes during post-CMP cleaning
- Bisht, Sanjay ;
- Yadav, Maheepal ;
- Park, Se-Hoon ;
- Hiyama, Hirokuni ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2026-10
- Applied Surface Science
- ELSEVIER
Article
Molybdenum Ion-Induced Adhesion of Colloidal Silica to Polyvinyl Acetal Brushes in Post-Chemical Mechanical Planarization Applications: Experiments and Multiscale Simulations
- Kumar, Sumit ;
- Jalalzai, Palwasha ;
- Kim, Tae-Gon ;
- Seo, Jihoon ;
- Lee, Junsang ;
- ... Kim, Byung-Hyun ;
- ... Park, Jin-Goo ;
- 외 3명
- 2026-05
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Polyethyleneimine polymer as an effective corrosion inhibitor for advanced node tungsten post-CMP cleaning
- Punathil Meethal, Ranjith ;
- Kumar, Sumit ;
- Yadav, Maheepal ;
- Jalalzai, Palwasha ;
- Klipp, Andreas ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2026-01
- Applied Surface Science
- ELSEVIER
2025
Article
Cobalt Ion Adsorption on Polyvinyl Acetal Brushes: Impact on Silica-Nanoparticle Loading During Metal Post-Chemical Mechanical Planarization Cleaning
- Yadav, Maheepal ;
- Bisht, Sanjay ;
- Kim, Byung-Hyun ;
- Hiyama, Hirokuni ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2025-12
- ACS APPLIED NANO MATERIALS
- AMER CHEMICAL SOC
Conference
Effect of Corrosion Inhibitors and Oxidizers to Achieve Controlled Molybdenum Oxidation and Dissolution
- 2025-10-31
Conference
Effect of Wafer-Brush Relative Velocity on Non-uniform PVA Brush Wear and Cleaning Consistency in Oxide Post-CMP Cleaning
- 2025-10-30
Conference
Stabilization of Polyvinyl Acetal (PVA) Brushes via Effective Removal of Intrinsic Impurities Through Advanced Cleaning Techniques
- 2025-10-30
Conference
Effect of Synthesis Materials and Process Parameters on Polyvinyl Acetal (PVA) Brushes Properties and Incoming Impurities
- 2025-10-30
Article
Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning
- 2025-10
- International Conference on Planarization/CMP Technology
- Chinese Mechanical Engineering Society (CMES)
1