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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 81번부터 90번까지의 결과를 표시합니다.
2019
Article
Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications
- Choi, In-Chan ;
- Kim, Hyun-Tae ;
- Yerriboina, Nagendra Prasad ;
- Lee, Jung-Hwan ;
- Teugels, Lieve ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2019-01
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
2018
Article
Scalable, sub 2μm pitch, Cu/SiCN to Cu/SiCN hybrid wafer-to-wafer bonding technology
- Beyne, Eric ;
- Kim, Soon-Wook ;
- Peng, Lan ;
- Heylen, Nancy ;
- De Messemaeker, Joke ;
- ... Kim, Tae-Gon ;
- 외 6명
- 2018-01
- Technical Digest - International Electron Devices Meeting
2017
Article
In-line atomic resolution local nanotopography variation metrology for CMP process
- Kim, Tae-Gon ;
- Heylen, Nancy ;
- Kim, Soon-Wook ;
- Vandeweyer, Tom ;
- Jo, Ah-Jin ;
- 외 6명
- 2017-10
- ICPT 2017 - International Conference on Planarization/CMP Technology
- VDE Verlag GmbH
2016
Article
In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscope
- KIM, TAE GON ;
- Ryu, Heon-yul ;
- Jo, Ahjin ;
- Cho, Sang-joon ;
- Park, Sang-il ;
- 외 1명
- 2016-10
- ECS Transactions
- Electrochemical Society, Inc.
Article
Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
- Kim, Tae-Gon ;
- Ryu, Heon-Yul ;
- Kenis, Karine ;
- Jo, Ah-Jin ;
- Cho, Sang-Joon ;
- 외 3명
- 2016-09
- Solid State Phenomena
- Scitec Publications Ltd.
2014
Article
Nanoparticle Removal with Megasonics: A Review
- Brems,S. ;
- Hauptmann,M. ;
- Camerotto, E. ;
- Pacco,A. ;
- KIM, TAE GON ;
- 외 4명
- 2014-00
- ECS Journal of Solid State Science and Technology
- Electrochemical Society, Inc.
2010
2009
Conference
Mechanisms of Colloidal Ceria Contamination and Cleaning during Oxide Post-CMP
- 2009-02-28