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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 91번부터 100번까지의 결과를 표시합니다.
2008
Article
Removal of Organic Wax and Particles on Final Polished Wafer by Ozonated DI Water
- Jae-Hwan Yi ;
- Seung-Ho Lee ;
- Tae-Gon Kim ;
- Gun-Ho Lee ;
- Eun-Suck Choi ;
- ... Jin-Goo Park
- 2008-06
- 한국재료학회지
- 한국재료학회
2007
Article
Damage free particle removal from EUVL mask layers by high energy laser shock cleaning (LSC)
- Kim, Tae-Gon ;
- Yoo, Young-Sam ;
- Son, Il-Ryong ;
- Kim, Tae-Geun ;
- Ahn, Jinho ;
- ... Park, Jin-Goo ;
- 외 3명
- 2007-11
- MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS
- JAPAN SOCIETY APPLIED PHYSICS
Article
Effect of particle deposition and wet/dry cleaning methods on particle removal efficiency
- Kim, Tae Gon ;
- Hu, Shan ;
- Busnaina, Ahmed.A. ;
- Park, Jin-Goo
- 2007-10
- ECS Transactions
- Electrochemical Society, Inc.
Article
Surface preparation in CMP process; post CMP cleaning and defects
- 2007-10
- ECS Transactions
- Electrochemical Society, Inc.
Article
Quantitative measurement of pattern collapse and particle removal force
- Kim, Tae Gon ;
- Wostyn, Kurt L. ;
- Mertens, P. ;
- Busnaina, Ahmed.A. ;
- Park, Jin-Goo
- 2007-10
- ECS Transactions
- Electrochemical Society, Inc.
Article
Development of post Ru CMP cleaning solutions
- Kim, In-Kwon ;
- Cho, Byung-Gwun ;
- Kim, Tae Gon ;
- Park, Jin-Goo
- 2007-10
- ICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings
- VDE Verlag GmbH
Article
Removal of organic wax and particles on silicon after batch type polishing by ozonated DI water
- Yi, Jae Hwan ;
- Lee, Seung Ho ;
- Kim, Tae Gon ;
- Park, Jin-Goo ;
- Lee, Gun Ho ;
- 외 1명
- 2007-10
- ECS Transactions
- Electrochemical Society, Inc.