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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 131번부터 140번까지의 결과를 표시합니다.
2022
Conference
Area-Selective Atomic Layer Deposition of Ru Thin Films Using Phosphonic Acid Self-Assembled Monolayers with Different Alkyl Chain Lengths,
- 2022-01-25
Conference
Area-Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide versus Nitride Selectivity,
- 2022-01-25
Conference
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films Using Vapor-Phase Amino Group-Containing Inhibitors,
- 2022-01-25
Conference
Inhibitor-Free Area-Selective Atomic Layer Deposition of SiO2 through Chemoselective Adsorption of an Aminodisilane Precursor on Oxide versus Nitride Substrates,
- 2022-01-25
Conference
Inherently Area-Selective Atomic Layer Deposition of Device-Quality Hf1-xZrxO2 Thin Films through Catalytic Local Activation,
- 2022-01-25
2021
Conference
Enhanced Selectivity on Area Selective Atomic Layer Deposition by using short-chain alkylating inhibitors
- 2021-12-02
Conference
Area Selective Atomic Layer Deposition with chemo-selective adsorption of short-chain alkylating inhibitors
- 2021-11-21