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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 141번부터 150번까지의 결과를 표시합니다.
2021
Conference
Process Overview of Area Selective Atomic Layer Deposition for Advanced Bottom-up Nanofabrication
- 2021-10-28
Conference
Area-Selective Atomic Layer Deposition of Ru Using Amino Group-Containing Inhibitors for Metal/Dielectric Selectivit
- 2021-10-21
Conference
A Study on Next-Generation Atomic Level Patterning Process Based on Area-Selective Deposition
- 2021-10-21
Conference
Advanced Area-Selective Atomic Layer Deposition through the Discrete Feeding of Short-Chain Inhibitor Molecules
- 2021-10-06
Article
Metal-insulator transition and interfacial thermal transport in atomic layer deposited Ru nanofilms characterized by ultrafast terahertz spectroscopy
- Shin, Hee Jun ;
- Lee, Jeong-Min ;
- Bae, Seongkwang ;
- Kim, Woo-Hee ;
- Sim, Sangwan
- 2021-10
- Applied Surface Science
- ELSEVIER
Article
Inherently Area-Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide Versus Nitride Selectivity
- Lee, Jinseon ;
- Lee, Jeong-Min ;
- Oh, Hongjun ;
- Kim, Changhan ;
- Kim, Jiseong ;
- ... Kim, Woo-Hee ;
- 외 3명
- 2021-08
- Advanced Materials for Optics and Electronics
- WILEY-V C H VERLAG GMBH