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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 151번부터 160번까지의 결과를 표시합니다.
2021
Article
Wafer-Scale Growth of a MoS2 Monolayer via One Cycle of Atomic Layer Deposition: An Adsorbate Control Method
- Kim, Dae Hyun ;
- Park, Jae Chan ;
- Park, Jeongwoo ;
- Cho, Deok-Yong ;
- Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo ;
- 외 1명
- 2021-06
- Chemistry of Materials
- AMER CHEMICAL SOC
Article
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
- Lee, Jeong min ;
- Lee, Jinseon ;
- Han, Ji won ;
- Park, Hwanyeol ;
- Kyung, Sejin ;
- ... Park, Tae joo ;
- ... Kim, Woo-Hee ;
- 외 2명
- 2021-02
- Applied Surface Science
- ELSEVIER
Conference
Area-Selective Atomic Layer Deposition Assisted by Short-Chain Alkanethiols Self-Assembled Monolayers
- 2021-01-27
Conference
Enhanced Selectivity of Atomic Layer Deposited Ru Thin Films through the Discrete Feeding of Aminosilane Inhibitor Molecules
- 2021-01-27
2020
Conference
Area-Selective Atomic Layer Deposition Assisted by Short-Chain Alkanethiols Self-Assembled Monolayers
- 2020-11-18
Conference
Enhanced Selectivity of Atomic Layer Deposited Ru Thin Films through the Discrete Feeding of Vapor-Phase Inhibitor
- 2020-11-18
Conference
Atomic Level Patterning Process of SiO2 Thin Films for Advanced Nanoelectronics
- 2020-11-18