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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 161번부터 170번까지의 결과를 표시합니다.
2019
Conference
Chemically controlled Megasonic Cleaning Technology for higher PRE and lower pattern damage
- 2019-04-03
Conference
Removal of Nano Particles on the Hard Mask Wafer Backside using Brush Cleaning
- 2019-04-02
Conference
Removal of Particulated Contaminants from Backside of EUV Mask Using Dry Cleaning
- 2019-02-15
Conference
Critical Nanotopography Metrology Study for Good CMP Process Control and Electrical Bonding Yield in Wafer-To-Wafer Hybrid Bonding
- 2019-02-15
Conference
Removal of EUV Exposed Hydrocarbon from Ru Capping Layer of EUV Mask Using the Mixture of Alkaline Solutions and Organic Solvents
- 2019-02-15
Article
Selection and Optimization of Corrosion Inhibitors for Improved Cu CMP and Post-Cu CMP Cleaning
- Ryu, Heon-Yul ;
- Cho, Byoung-Jun ;
- Yerriboina, Nagendra Prasad ;
- Lee, Chan-Hee ;
- Hwang, Jun-Kil ;
- ... Park, Jin-Goo ;
- 외 3명
- 2019-02
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Article
Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity
- Ryu, Heon-Yul ;
- Kim, Myeong-Jun ;
- Yerriboina, Nagendra Prasad ;
- Srinivasan, Ramanathan ;
- Park, Jin-Goo
- 2019-01
- Electronic Materials Letters
- KOREAN INST METALS MATERIALS
Article
Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications
- Choi, In-Chan ;
- Kim, Hyun-Tae ;
- Yerriboina, Nagendra Prasad ;
- Lee, Jung-Hwan ;
- Teugels, Lieve ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2019-01
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC