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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 151번부터 160번까지의 결과를 표시합니다.
2019
Article
Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process
- Lee, Jung-Hwan ;
- Poddar, Maneesh Kumar ;
- Yerriboina, Nagendra Prasad ;
- Ryu, Heon-Yul ;
- Han, Kwang-Min ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2019-09
- Polymer Testing
- ELSEVIER SCI LTD
Article
Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning
- Lee, Jung-Hwan ;
- Purushothaman, Muthukrishnan ;
- Han, Kwang-Min ;
- Ryu, Heon-Yul ;
- Yerriboina, Nagendra Prasad ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2019-08
- Polymer Testing
- ELSEVIER SCI LTD
Article
A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process
- Lee, Jung-Hwan ;
- Ryu, Heon-Yul ;
- Hwang, Jun-Kil ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2019-06
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
A Novel Method to Evaluate the Catalyst Effect on the Performance of W CMP Process
- 2019-05-16
Article
Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
- Ryu, Heon-Yul ;
- Kim, Ji-Woo ;
- Hyun, Da-Bin ;
- Kim, Yeo-Ho ;
- Lee, Jung-Hwan ;
- ... Park, Jin-Goo
- 2019-05
- Electronic Materials Letters
- KOREAN INST METALS MATERIALS
Article
Preface-JSS Focus Issue on CMP for Sub-10 nm Technologies
- Philipossian, Ara ;
- Park, Jin-Goo
- 2019-05
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC