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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 181번부터 190번까지의 결과를 표시합니다.
2018
Article
Effect of organic acids in dilute HF solutions on removal of metal contaminants on silicon wafer
- Lee, Dong-Hwan ;
- Kim, Hyun-Tae ;
- Jang, Sung-Hae ;
- Yi, Jae-Hwan ;
- Choi, Eun-Suck ;
- ... Park, Jin-Goo
- 2018-10
- Microelectronic Engineering
- ELSEVIER SCIENCE BV
Article
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
- Kim, Min-Su ;
- Purushothaman, Muthukrishnan ;
- Kim, Hyun-Tae ;
- Song, Hee-Jin ;
- Kim, Young-Woong ;
- ... Park, Jin-Goo ;
- 외 2명
- 2018-10
- Colloids and Surfaces A: Physicochemical and Engineering Aspects
- ELSEVIER SCIENCE BV
Conference
Characterization of Cu-Inhibitor Complex Layer with AFM and Microfluidics Chip System
- 2018-08-23
Conference
Diluted HF cleaning process for metal contamination removal from silicon wafer
- 2018-08-23
Conference
Development of New Analysis Method with Ultrasonication for Incoming PVA Brush in Post-CMP Cleaning Process
- 2018-08-23
Article
Area-selective atomic layer deposition using inkjet-printed fluorocarbon patterns as mask layers
- Cho, Youngin ;
- Yu, Jun ho ;
- Yoon, Dai geon ;
- Park, Jin-Goo ;
- Choi, Kyung hyun ;
- 외 1명
- 2018-05
- Digest of Technical Papers - SID International Symposium