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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 171번부터 180번까지의 결과를 표시합니다.
2019
Article
The adhesion and removal mechanism of Ceria particles for STI post-CMP cleaning process
- Yerriboina, Nagendra.Prasad ;
- Sahir, Samrina ;
- Han, So Young ;
- Han, Kwang min ;
- Park, Jin-Goo
- 2019-00
- ECS Transactions
- Electrochemical Society, Inc.
2018
Conference
Quantitative and Qualitative Kinetic Analysis of Single, Double and Triple Slurry Components for Cu CMP
- 2018-10-16
Conference
A Novel Method to Evaluate the Catalyst Effect on the Performance of W CMP Process
- 2018-10-16
Conference
Adhesion and Removal Behavior of Contaminants from Polyvinyl Acetal (PVA) Brush during Post CMP Cleaning Process
- 2018-10-16
Conference
Nanocatalyst Induced Hydroxyl Radical (·OH) for Removal of Tungsten (W) in Chemical Mechanical Polishing
- 2018-10-15
Conference
Role of Slurry Bubble Formation on the Generation of Defects during W CMP Process
- 2018-10-15