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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 201번부터 210번까지의 결과를 표시합니다.
2017
Article
Adhesion and removal behavior of particulate contaminants from EUV mask materials
- Kim, Min-Su ;
- Purushothaman, Muthukrishnan ;
- Kim, Hyun-Tae ;
- Song, Hee-Jin ;
- Park, Jin-Goo
- 2017-12
- Colloids and Surfaces A: Physicochemical and Engineering Aspects
- ELSEVIER SCIENCE BV
Conference
Development of Post InGaAs CMP Cleaning Process for sub 10nm Device Application
- 2017-10-13
Conference
Chemical Generation Mechanism of Copper Flake Defects on Copper Wafer Surface from CMP Slurry and Post CMP Cleaning Chemistry
- 2017-10-12
Conference
Optimization of Cu Corrosion Inhibitor Concentration to Reduce Organic Defects
- 2017-10-11
Conference
Novel Method for Nano-Surface Analysis of Cu CMP Chemicals by AFM and Microfluidics Chip System
- 2017-10-11
Article
Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node
- Kim, Guk-Jin ;
- Kim, In-Seon ;
- Lee, Sung-Gyu ;
- Yeung, Michael ;
- Kim, Min-Su ;
- ... Park, Jin-Goo ;
- 외 1명
- 2017-10
- Japanese Journal of Applied Physics
- IOP PUBLISHING LTD
Article
Novel method for nano-surface analysis of Cu CMP chemicals by AFM and microfluidic chip system
- Ryu, Heon yul ;
- Han, Kwang min ;
- Cho, Byoung jun ;
- Shima, Shohei ;
- Hamada, Satomi ;
- ... Park, Jin goo ;
- 외 2명
- 2017-10
- ICPT 2017 - International Conference on Planarization/CMP Technology
- VDE Verlag GmbH