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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 41번부터 50번까지의 결과를 표시합니다.
2024
Conference
Electrochemical Study on Better Controllability of Cu Pad Topography in Cu/Ti CMP
- 2024-01-26
2023
Conference
Effect of amine on oxide and nitride surfaces and ceria contaminatin during STI CMP process
- 2023-11-20
Conference
Effect of colloidal silica and molybdenum ions on PVA brush loading during Mo Post-CMP cleaning
- 2023-11-20
Conference
Effect of etchants and oxidizers on the molybdenum surfaces during post-CMP cleaning process
- 2023-10-31
Conference
A novel approach for PVA brush evaluation by contact area analysis during metal and oxide post-CMP cleaning
- 2023-10-31
Conference
Effect of cobalt ion on silica loading to PVA brsuh during Co post-CMP cleaning
- 2023-10-31
Conference
Effect of chelating agents on the removal of Ti ion during W post-CMP cleaning
- 2023-10-31
Conference
Contact and non-contact PVA brush conditioning during oxide and metal post-CMP cleaning
- 2023-10-31