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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 31번부터 40번까지의 결과를 표시합니다.
2024
Conference
Investigation of Silica particle and Mo ion contamination on PVA brush during Mo post-CMP cleaning process
- 2024-10-16
Conference
Effect of Sugar Alcohols on Silicon Oxide and Silicon Nitride Removal Rate as a Function of Carbon Number in STI CMP
- 2024-10-16
Conference
Investigation of the root cause of the scratch formation during copper post-CMP brush scrubbing
- 2024-10-16
Conference
Study of Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC
- 2024-10-11
Conference
Investigation on the Effects of Slurry Additives and Pad Morphology in Cu CMP for Hybrid Cu Bonding
- 2024-10-01
Conference
Effect of SDS Surfactant in H2 DIW on Cavitation Bubble Dynamics in Ultrasonic and Megasonic Fields
- 2024-04-25
Conference
Changes in Surface Chemical Characteristics of 4H-SiC for Better Cleaning Performance
- 2024-04-24