상세 보기
박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 51번부터 60번까지의 결과를 표시합니다.
2023
Conference
Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning
- 2023-10-31
Article
Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application
- Punathil Meethal, Ranjith ;
- Jalalzai, Palwasha ;
- Muskan ;
- Kumar, Sumit ;
- Peter, Jerome ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2023-08
- Journal of Colloid and Interface Science
- ACADEMIC PRESS INC ELSEVIER SCIENCE
Article
Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
- Kim, Dong-Gyu ;
- Vereecke, Guy ;
- Gowda, Pallavi Puttarame ;
- Wostyn, Kurt ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2023-08
- Solid State Phenomena
- Scitec Publications Ltd.
Article
Acoustic power dependent detachment of PSL particles adhered to glass surfaces by dissolved gas and anionic surfactant in an ultrasonic field
- Sahoo, Bichitra Nanda ;
- Yerriboina, Nagendra Prasad ;
- Kang, Bong-kyun ;
- Klipp, Andreas ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2023-08
- Colloids and Surfaces A: Physicochemical and Engineering Aspects
- ELSEVIER
Article
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
- Samanta, Suprakash ;
- Jin, Seungwan ;
- Lee, Chan-Hee ;
- Lee, Seong-Soo ;
- Struyf, Herbert ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2023-07
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
2022
Article
Removal Behavior of Sn and Pb Contaminants on EUV mask after EUV Exposure
- Kwon, Dong hyeon ;
- Kang, Hyun gyu ;
- Kim, Tae Gon ;
- Ahn, JIn Ho ;
- Lee, Sang Sul ;
- ... Park, Jin Goo
- 2022-12
- PHOTOMASK TECHNOLOGY 2022
- SPIE-INT SOC OPTICAL ENGINEERING