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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 71번부터 80번까지의 결과를 표시합니다.
2022
Conference
Characterization of impurities from incoming PVA brush for sub 10 nm post CMP cleaning process
- 2022-10-17
Conference
Effect of colloidal silcia and copper ions on PVA brush contamination during post-Cu CMP cleaning
- 2022-09-29
Conference
Electrochemical investigations on the corrosion and inhibition during W post-CMP cleaning
- 2022-09-29
Conference
Effect of skin layer of PVA brush on static and dynamic contact area during post CMP cleaning
- 2022-09-28