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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 61번부터 70번까지의 결과를 표시합니다.
2022
Conference
Mechanism of PVA brush loading with colloidal silica and metal ions during Cu post-CMP cleaning
- 2022-11-16
Conference
Effect of Scrubbing Parameters on Mechanical Properties and Wafer Cleaning during Post-CMP PVA Brush Cleaning
- 2022-11-14
Conference
Effect of Ti ions on PVA brush loading with colloidal silica during W post-CMP cleaning
- 2022-11-10
Conference
Investigation of ceria-PVA brush chemical interaction leading to cross-contamination issues in post-CMP cleaning
- 2022-11-10
Article
Effect of slurry particles on PVA brush contamination during post-CMP cleaning
- Sahir, Samrina ;
- Cho, Hwi-Won ;
- Jalalzai, Palwasha ;
- Samanta, Suprakash ;
- Hamada, Satomi ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2022-11
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD