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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 81번부터 90번까지의 결과를 표시합니다.
2022
Article
Effect of Slurry Additives on Co-BTA Complex Stability and Inhibition Property During Co CMP Process
- Jalalzai, Palwasha ;
- Ryu, Heon-Yul ;
- Sahir, Samrina ;
- Meethal, Ranjith Punathil ;
- Hamada, Satomi ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2022-08
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
Characterization of ceria and silica particles loading to PVA brush during post-CMP cleaning
- 2022-06-16
Article
Characterization of Wetting Behavior on High Aspect Ratio Multilayer Structure
- Kim, Tae-Gon ;
- Kim, Donggyu ;
- Kim G. ;
- Park, Jingoo
- 2022-06
- ECS Transactions
- Electrochemical Society, Inc.
Article
Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications
- Ryu, Heon-Yul ;
- Lee, Chi Ho ;
- Lee, Sang Uck ;
- Hamada, Satomi ;
- Yerriboina, Nagendra Prasad ;
- ... Park, Jin-Goo
- 2022-06
- Microelectronic Engineering
- ELSEVIER