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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 101번부터 110번까지의 결과를 표시합니다.
2021
Conference
Study of ceria penetration inside the PVA brush during post-CMP cleaning process
- 2021-10-29
Book
Surfactants in Precision Cleaning Removal of Contaminants At the Micro and Nanoscale
- 2021-10
- ELSEVIER
Article
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
- Ryu, Heon-Yul ;
- Teugels, Lieve ;
- Devriendt, Katia ;
- Struyf, Herbert ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2021-09
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
Effect of slurry additives on Co-BTA complex stability and inhibition property during Co CMP process
- 2021-06-08
Conference
Effect of skin layer on brush loading, cross-contamination, and cleaning performance during post CMP cleaning
- 2021-06-08
Conference
Effect of power and surfactant on the behavioral of bubbles in an ultrasonic field
- 2021-06-08
Conference
An Analysis Method of the Wetting Characteristic of High Aspect Ratio Structure
- 2021-06-08
Conference
Effect of surfactant in gas dissolved cleaning solutions on acoustic bubble dynamics
- 2021-04-15