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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 91번부터 100번까지의 결과를 표시합니다.
2022
Conference
Electrochemical investigations on galvanic corrosion during CMP/Post-CMP processes
- 2022-05-19
Article
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
- Sahir, Samrina ;
- Cho, Hwi-Won ;
- Jalalzai, Palwasha ;
- Peter, Jerome ;
- Singh, Randeep ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2022-05
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
Investigation of Ceria-oxide and Ceria-brush interactions leading to post-CMP cleaning issues
- 2022-04-21
Article
Study on PVA Brush Loading and Conditioning during Shallow Trench Isolation Post-CMP Cleaning Process
- Sahir, Samrina ;
- Cho, Hwi-Won ;
- Kim, Tae-Gon ;
- Hamada, Satomi ;
- Yerriboina, Nagendra Prasad ;
- ... Park, Jin-Goo
- 2022-02
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Article
Particle Removal by Surfactants During Semiconductor Cleaning
- Yerriboina, Nagendra Prasad ;
- Park, Jin-Goo ;
- Poddar, Maneesh Kumar
- 2022-01
- Surfactants in Precision Cleaning: Removal of Contaminants at the Micro and Nanoscale
- Elsevier
Article
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
- Sahoo, Bichitra Nanda ;
- Han, So Young ;
- Kim, Hyun-Tae ;
- Ando, Keita ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2022-01
- Ultrasonics Sonochemistry
- ELSEVIER
2021
Conference
Study on the Effect of Copper Ions on Brush Loading during Post-Cu-CMP Cleaning
- 2021-11-18
Conference
Study on the effect of copper ions on brush loading during post-Cu-CMP cleaning
- 2021-10-29