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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 91번부터 100번까지의 결과를 표시합니다.
2023
Article
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films Using Aldehyde Inhibitors
- Park, Haneul ;
- Oh, Jieun ;
- Lee, Jeong-Min ;
- Kim, Woo-Hee
- 2023-05
- 2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAM
- IEEE
Conference
Area-Selective Atomic Layer Deposition Using Aminosilane Precursors to Confer Oxide versus Nitride Selectivity
- 2023-04-14
Article
Advanced atomic layer deposition (ALD): controlling the reaction kinetics and nucleation of metal thin films using electric-potential-assisted ALD
- Han, Ji Won ;
- Jin, Hyun Soo ;
- Kim, Yoon Jeong ;
- Heo, Ji Sun ;
- Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo
- 2023-03
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
Article
Dysprosium Incorporation for Phase Stabilization of Atomic-Layer- Deposited HfO2 Thin Films
- Lee, Yujin ;
- Kim, Kangsik ;
- Lee, Zonghoon ;
- Lee, Hong-Sub ;
- Lee, Han-Bo-Ram ;
- ... Kim, Woo-Hee ;
- 외 2명
- 2023-03
- Chemistry of Materials
- AMER CHEMICAL SOC
Conference
Area-Selective Atomic Layer Deposition of High-k Dielectrics by Vapor-Dosed Phosphonic Acid Inhibitors Combined with Selective Lift-Off
- 2023-02-15
Conference
Area-selective Atomic Layer Deposition Using Alkanethiol SAMs with Surface Pre-treatment
- 2023-02-15
Conference
Area‐Selective Atomic Layer Deposition of Ru Thin Films Using Aldehyde-Based Inhibitors on Nitride Surfaces
- 2023-02-15
Article
Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents,
- Lee, Jeong-Min ;
- Lee, Seo-Hyun ;
- Oh, Jieun ;
- Kim, Woo-Hee
- 2023-02
- Materials Letters
- ELSEVIER