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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 111번부터 120번까지의 결과를 표시합니다.
2022
Article
Inhibitor-free area-selective atomic layer deposition of SiO2 through chemoselective adsorption of an aminodisilane precursor on oxide versus nitride substrates
- Lee, Jeong-Min ;
- Lee, Jinseon ;
- Oh, Hongjun ;
- Kim, Jiseong ;
- Shong, Bonggeun ;
- ... Park, Tae Joo ;
- ... Kim, Woo-Hee
- 2022-07
- Applied Surface Science
- ELSEVIER
Conference
Inherently Area-Selective Atomic Layer Deposition of SiO2 through Chemoselective Adsorption of an Aminodisilane Precursor on Oxide/Nitride Substrates
- 2022-06-28
Conference
Area-Selective Atomic Layer Deposition Using Vapor Dosing of Short-Chain Alkanethiol Inhibitors on Metal/Dielectric Surfaces,
- 2022-06-23
Article
Advanced Atomic Layer Deposition: Ultrathin and Continuous Metal Thin Film Growth and Work Function Control Using the Discrete Feeding Method
- Han, Ji Won ;
- Jin, Hyun Soo ;
- Kim, Yoon Jeong ;
- Heo, Ji Sun ;
- Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo ;
- 외 1명
- 2022-06
- Nano Letters
- AMER CHEMICAL SOC
Conference
Inherently Area-Selective Atomic Layer Deposition of Device-Quality Hf1-xZrxO2 Thin Films through Catalytic Local Activation,
- 2022-05-27
Conference
Area-Selective Atomic Layer Deposition of Ru Thin Films Using Self-Assembled Monolayers with Different Alkyl Chain Lengths,
- 2022-05-27