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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 81번부터 90번까지의 결과를 표시합니다.
2023
Conference
Low-Temperature Chemical Vapor Deposition of SnOx Thin Film toward Next-Generation EUV Dry Resist
- 2023-06-09
Conference
Elucidating Smoothing Effect on Ultra-thin Ruthenium Films with the Combined Atomic Layer Deposition and Etching Process
- 2023-06-09
Conference
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films Using Vapor Dosing of Aldehyde Inhibitors on Various Substrates
- 2023-06-09
Conference
Improved DRAM Electrode Dielectric Interface Properties Using NbOx Film Using Area-Selective Atomic Layer Deposition
- 2023-06-09
Conference
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents
- 2023-05-23
Conference
Area-Selective Atomic Layer Deposition of Ruthenium Thin films Using Aldehyde Inhibitors
- 2023-05-23
Conference
Area-Selective Atomic Layer Deposition of Ru Thin Films using Inhibitors for Metal-Dielectric Selectivity
- 2023-05-11
Conference
Area-Selective Atomic Layer Deposition for Device-Quality High-k Dielectrics Fabrication
- 2023-05-10
Conference
Achieving Area-Selective Atomic Layer Deposition on Various Substrates Using an Aromatic Inhibitor
- 2023-05-10
Article
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents
- Lee,Jeong-Min ;
- Kim, Woo-Hee
- 2023-05
- 2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAM
- IEEE