상세 보기
자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 101번부터 110번까지의 결과를 표시합니다.
2023
Article
Advanced atomic layer deposition: metal oxide thin film growth using the discrete feeding method
- Park, Jae Chan ;
- Choi, Chang Ik ;
- Lee, Sang-Gil ;
- Yoo, Seung Jo ;
- Lee, Ji-Hyun ;
- ... Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo ;
- 외 2명
- 2023-01
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
2022
Article
Area-selective atomic layer deposition of Ru thin films using phosphonic acid self-assembled monolayers for metal/dielectric selectivity
- Lee, Seo-Hyun ;
- Lee, Jeong-Min ;
- Lee, Ji Hun ;
- Kwak, Junghun ;
- Chung, Sung-Woong ;
- ... Kim, Woo - Hee
- 2022-12
- Materials Letters
- ELSEVIER
Conference
Inherently Area Selective Atomic Layer Deposition Toward Self-Aligned Atomic Level Patterning
- 2022-11-16
Conference
Inherently Area-Selective Atomic Layer Deposition of Device-Quality Hf1-xZrxO2 Thin Films through Catalytic Local Activation
- 2022-11-16
Conference
Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents,
- 2022-11-10
Conference
Area-Selective Atomic Layer Deposition by Surface Modification with an Aromatic Inhibitor,
- 2022-11-09
Conference
Atomic Layer Etching of Ruthenium with Sequential Oxidation and Volatilization reactions,
- 2022-11-09
Article
Rhenium oxide/sulfide binary phase flakes decorated on nanofiber support for enhanced activation of electrochemical conversion reactions
- Kim, Ga-Yoon ;
- Lee, Jeongbin ;
- Rho, Yeo-Jin ;
- Kim, Woo-Hee ;
- Kim, MinJoong ;
- ... Ahn, Ji-Hoon ;
- 외 1명
- 2022-10
- Chemical Engineering Journal
- ELSEVIER SCIENCE SA