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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 111번부터 120번까지의 결과를 표시합니다.
2021
Conference
Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process
- 2021-04-15
Conference
Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- 2021-04-14
Article
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Han, So-Young ;
- Han, Kwang-Min ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2021-04
- Applied Surface Science
- ELSEVIER
Article
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Han, So Young ;
- Kim, Tae Gon ;
- Mahadev, Niraj ;
- ... Park, Jin-Goo
- 2021-03
- Microelectronic Engineering
- ELSEVIER
Article
Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- An, Kook-Hyun ;
- Kim, Dong-Gyu ;
- Kim, Hyun-Tae ;
- Yerriboina, Nagendra Prasad ;
- KIM, TAE GON ;
- ... Park, Jin Goo
- 2021-02
- Solid State Phenomena
- Scitec Publications Ltd.
Article
Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
- Han, Soyoung ;
- Yerriboina, Nagendra Prasad ;
- Sahoo, Bichitra Nanda ;
- Kang, Bong Kyun ;
- Klipp, Andreas ;
- ... Park, Jin Goo
- 2021-02
- Solid State Phenomena
- Scitec Publications Ltd.
Article
The Effect of Thermal Aging on Nano-Particle Removal
- Kim, Yeoho ;
- Jin, Seung-Wan ;
- Kim, Hyun-Tae ;
- Kim, Tae-Gon ;
- Won, Kyu-Hwang ;
- ... Park, Jin Goo
- 2021-02
- Solid State Phenomena
- Scitec Publications Ltd.
Article
Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process
- Sahir, Samrina ;
- Cho, Hwi-Won ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae-Gon ;
- Hamada, Satomi ;
- ... Park, Jin Goo
- 2021-02
- Solid State Phenomena
- Scitec Publications Ltd.
Article
Tungsten passivation layer (WO3) formation mechanisms during chemical mechanical planarization in the presence of oxidizers
- Poddar, Maneesh Kumar ;
- Jalalzai, Palwasha ;
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae Gon ;
- ... Park, Jin-Goo
- 2021-01
- Applied Surface Science
- ELSEVIER