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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 121번부터 130번까지의 결과를 표시합니다.
2021
Article
Latest developments in the understanding of PVA brush related issues during post CMP (pCMP) cleaning
- Yerriboina, Nagendra Prasad ;
- Park, Jin-Goo
- 2021-01
- Advances in Chemical Mechanical Planarization (CMP)
- Elsevier
Article
Effect of dissolved oxygen on removal of benzotriazole from co during a post-co cmp cleaning
- Ryu, Heon Yul ;
- Jalalzai, Palwasha ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae Gon ;
- Hamada, Satomi ;
- ... Park, Jin Goo
- 2021-00
- Solid State Phenomena
- Scitec Publications Ltd.
2020
Article
Adhesive resin composites with ceramic nanoparticles for enhanced light extraction efficiency of sandwiched LED device structure
- Park, Jin gyeong ;
- Ji, Myeongjun ;
- Ko, Yun taek ;
- Ryu, Cheol hui ;
- Kim, Jeong hyun ;
- ... Choa, Yong Ho ;
- 외 1명
- 2020-12
- Materials Today Communications
- ELSEVIER
Article
Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process
- Han, Kwang-Min ;
- Han, So-Young ;
- Sahir, Samrina ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 1명
- 2020-12
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Conference
Effect of particle Agglomeration by Air bubble during Tungsten (W) CMP Process
- 2020-11-19
Article
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
- Lee, Jung-Hwan ;
- Poddar, Maneesh Kumar ;
- Han, Kwang-Min ;
- Ryu, Heon-Yul ;
- Yerriboina, Nagendra Prasad ;
- ... Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 3명
- 2020-10
- Polymer Testing
- ELSEVIER SCI LTD
Conference
Mechanisms of Colloidal Ceria Contamination and Cleaning during Oxide Post-CMP
- 2020-09-02