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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 211번부터 220번까지의 결과를 표시합니다.
2017
Article
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
- Kim, Guk-Jin ;
- Kim, In-Seon ;
- Lee, Sung-Gyu ;
- Yeung, Michael ;
- Kim, Min-Su ;
- ... Park, Jin-Goo ;
- 외 1명
- 2017-10
- Journal of Micro/ Nanolithography, MEMS, and MOEMS
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Article
Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution
- Kim, Min-Su ;
- Paluvai, Nagarjuna Reddy ;
- Kim, Hyun-Tae ;
- Park, Jin-Goo
- 2017-08
- Materials Science & Engineering B
- ELSEVIER SCIENCE BV
Conference
Investigation of Particle Contamination and Removal Mechanism with Corrosion Inhibitors for Cu CMP Application
- 2017-05-18
Conference
Effect of Additives in Diluted HF Solutions on Removal of Metal Contaminants and Particles on Silicon Wafer
- 2017-03-29
Article
Antistiction layers for nano imprinting lithography
- Cha, Nam Goo ;
- Park, Jin-Goo
- 2017-01
- Nanomanufacturing Handbook
- CRC Press
Article
Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs
- Jeong, Daekyun ;
- Lim, Chefwi ;
- Kim, Myeonggi ;
- Jeong, Kyunghoon ;
- Kim, Jae-Hun ;
- ... Park, Jin-Goo ;
- 외 3명
- 2017-01
- Electronic Materials Letters
- KOREAN INST METALS MATERIALS