상세 보기
박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 221번부터 230번까지의 결과를 표시합니다.
2017
Article
A novel cleaning approach to remove the carbon contaminant from Ru surface of EUV mask
- Kim, Min su ;
- Song, Hee jin ;
- Kim, Hyun tae ;
- Park, Jin-Goo
- 2017-00
- ECS Transactions
- Electrochemical Society, Inc.
Article
Modification of DHF for removal of metals from silicon wafer
- Lee, Dong Hwan ;
- Song, Hee jin ;
- Jang, Sung hae ;
- Kim, Hyun tae ;
- Yi, Jae Hwan ;
- ... Park, Jin-Goo ;
- 외 1명
- 2017-00
- ECS Transactions
- Electrochemical Society, Inc.
Article
Evaluation of competitive reaction of various cu CMP slurry components
- Han, Kwang min ;
- Cho, Byoung jun ;
- Lee, Jung hwan ;
- Ryu, Heon yul ;
- Shima, Shohei ;
- ... Park, Jin-Goo ;
- 외 2명
- 2017-00
- ICPT 2017 - International Conference on Planarization/CMP Technology
- VDE Verlag GmbH
Article
Development of post InGaAs CMP cleaning process for sub 10nm device application
- Purushothaman, Muthukrishnan ;
- Choi, In chan ;
- Kim, Hyun tae ;
- Teugels, Lieve ;
- Kim, Tae gon ;
- ... Park, Jin goo
- 2017-00
- ICPT 2017 - International Conference on Planarization/CMP Technology
- VDE Verlag GmbH
Article
Preparation of a high hydrophobic aluminium surface by double zincating process
- Paluvai, Nagarjuna Reddy ;
- Hafeez, Hassan ;
- Han, Dong-Ho ;
- Ryu, Heon-Yul ;
- Lee, Choon-Soo ;
- ... Park, Jin-Goo
- 2017-00
- Journal of Adhesion Science and Technology
- TAYLOR & FRANCIS LTD
Article
Contamination Removal From UV and EUV Photomasks
- Venkatesh, R. Prasanna ;
- Kim, Min su ;
- Park, Jin-Goo
- 2017-00
- Developments in Surface Contamination and Cleaning
- Elsevier Inc.
Article
Characterization of ammonium silicate residue during Polysilazane (PSZ) dry etching in NF3/H2O gas chemistry
- Kim, Hyun tae ;
- Kim, Min su ;
- Lee, Jong seok ;
- Choi, Geun min ;
- Park, Jin goo
- 2017-00
- ECS Transactions
- Electrochemical Society, Inc.
Conference
Characterization of incoming PVA brush by an ultrasonication break-in process
- Lee, Jung hwan ;
- Pyun, Hae jung ;
- Purushothaman, Muthukrishnan ;
- Paluvai, Nagarjuna reddy ;
- Cho, Byoungjun ;
- ... Park, Jin-Goo ;
- 외 4명
- 2017-00
- 독일
2016
Article
Effect of Feature Spacing When Injection Molding Parts With Microstructured Surfaces
- Birkar, Smita ;
- Mendible, Gabriel ;
- Park, Jin-Goo ;
- Mead, Joey L. ;
- Johnston, Stephen P. ;
- 외 1명
- 2016-12
- Polymer Engineering and Science
- WILEY