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자료 필터
자료유형
발행연도
2005 ~ 2027
2005 2027
키워드
언어
전체 104건 중 21번부터 30번까지의 결과를 표시합니다.
2025
Article
Combined Effects of PVA Brush Scrubbing Parameters and Processes on Post-CMP Cross-Contamination
- Han, Kwang-Min ;
- Kumar, Sumit ;
- Khan, Mir Jalal ;
- Lee, Jae-Hyeong ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2025-04
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
2024
Conference
Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning
- 2024-10-18
Conference
Impact of CMP Slurry Additives on Copper Pad Corrosion and Surface Topography of Interest to Cu-Cu Hybrid Bonding
- 2024-10-17
Conference
Investigation of silica particle and Mo ion contamination on PVA brush during Mo post-CMP cleaning process
- 2024-10-16
Conference
Investigation of the root cause of the scratch formation during copper post-CMP brush scrubbing
- 2024-10-16
Conference
Study of Chemical-Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC
- 2024-10-11
Conference
Changes in Surface Chemical Characteristics of 4H-SiC for Better Cleaning Performance
- 2024-04-24
Conference
Electrochemical Study on Better Controllability of Cu Pad Topography in Cu/Ti CMP Seonwoo
- 2024-01-26