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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 51번부터 60번까지의 결과를 표시합니다.
2024
Article
Selective nitride passivation using vapor-dosed aldehyde inhibitors for area-selective atomic layer deposition
- Park, Haneul ;
- Oh, Jieun ;
- Lee, Jeong-Min ;
- Kim, Woo-Hee
- 2024-07
- Materials Letters
- ELSEVIER
Article
Enhanced Deposition Selectivity of High‑k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
- Lee, Jeong-Min ;
- Lee, Seo-Hyun ;
- Lee, Ji Hun ;
- Kwak, Junghun ;
- Lee, Jinhee ;
- ... Kim, Woo-Hee
- 2024-07
- ACS Applied Materials & Interfaces
- AMER CHEMICAL SOC
Article
Area-selective atomic layer deposition of Ru thin films by chemo-selective inhibition of alkyl aldehyde molecules on nitride surfaces
- Lee, Jinseon ;
- Oh, Jieun ;
- Kim, Jiwon ;
- Oh, Hongjun ;
- Shong, Bonggeun ;
- ... Kim, Woo-Hee
- 2024-07
- Applied Surface Science
- Elsevier BV
Conference
Area-Selective Atomic Layer Deposition of SiO2 Thin Films using Self-Assembled Monolayers on Amorphous Carbon versus Silicon
- 2024-06-10
Conference
Area-Selective Atomic Layer Deposition of Al2O3 with Short-Chain Alkanethiol Self-Assembled Monolayers
- 2024-06-10
Conference
Area-Selective Atomic Layer Deposition of Ruthenium Thin Films by Chemo-Selective Inhibition of Alkyl Aldehyde Molecules on Nitride Surfaces
- 2024-06-10
Conference
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
- 2024-05-24
Article
Highly area-selective atomic layer deposition of device-quality Hf1-xZrxO2 thin films through catalytic local activation
- Kim, Hyo-Bae ;
- Lee, Jeong-Min ;
- Sung, Dougyong ;
- Ahn, Ji-Hoon ;
- Kim, Woo-Hee
- 2024-05
- Chemical Engineering Journal
- ELSEVIER SCIENCE SA
Article
Atomic layer deposited RuO2 with controlled crystallinity and thickness for oxygen evolution reaction catalysis
- Lee, Jaehwan ;
- Lee, Sanghun ;
- Kim, Youngjun ;
- Kwon, Yongju ;
- Kim, Woo-Hee ;
- 외 3명
- 2024-02
- Vacuum
- PERGAMON-ELSEVIER SCIENCE LTD