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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 71번부터 80번까지의 결과를 표시합니다.
2023
Conference
Enhancing Surface Smoothness in Ultra-thin Metal films with the Combined Atomic Layer Deposition and Etching Process
- 2023-11-22
Conference
Combined Atomic Layer Deposition and Etching Process towards Advanced Atomic Level Patterning
- 2023-11-21
Article
Chemical mechanism of oxidative etching of ruthenium: Insights into continuous versus self-limiting conditions
- Yu, Neung-Kyung ;
- Lee, Jeong-Min ;
- Kim, Woo-Hee ;
- Shong, Bonggeun
- 2023-11
- Applied Surface Science
- ELSEVIER
Conference
Area-Selective Atomic Layer Deposition on Dielectric Substrates via Selective Adsorption of Small Molecule Inhibitors
- 2023-07-25
Conference
Area-Selective Atomic Layer Deposition of Ru Thin Films Using Phosphonic Acid Self-Assembled Monolayers for Metal/Dielectric Selectivity
- 2023-07-25
Conference
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor-Dosed Phosphonic Acid Inhibitors Combined with Selective Lift-Off
- 2023-07-25
Article
High-quality SiNx thin-film growth at 300 °C using atomic layer deposition with hollow-cathode plasma
- Park, Jae Chan ;
- Kim, Dae Hyun ;
- Seok, Tae Jun ;
- Kim, Dae Woong ;
- Ahn, Ji-Hoon ;
- ... Kim, Woo-Hee ;
- ... Park, Tae Joo
- 2023-07
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY