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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 221건 중 61번부터 70번까지의 결과를 표시합니다.
2024
Conference
Develop Behavior of Metal Organic Chemical Vapor Deposited Sn-based Inorganic Dry Resist for Next-generation EUV Lithography
- 2024-01-26
Conference
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor-Dosed Self-Assembled Monolayer Inhibitors Combined with Selective Lift-Off
- 2024-01-26
Conference
Area-Selective Atomic Layer Deposition of Al2O3 Thin Films for Metal versus Dielectric Selectivity Using Vapor-Dosed Alkanethiol
- 2024-01-25
Conference
Improved DRAM eletrode/dielectric interface properties using Nb2O5 and Ta2O5 ultrathin layer
- 2024-01-25
2023
Conference
Area Selective Atomic Layer Deposition of Nb2O5 for Improved Interface Quality between ZrO2 Dielectric and Bottom TiN Electrode
- 2023-11-22
Conference
Area-Selective Atomic Layer Deposition for Metal/Dielectric Selectivity by Using Small Molecule Inhibitors
- 2023-11-22
Conference
Enhanced Metal/Dielectric Selectivity in Ru Atomic Layer Deposition with Alkyl-Chain Length Dependent Phosphonic Aicd Self-Assembled Monlayers
- 2023-11-22
Conference
Area-Selective Atomic Layer Deposition of Ru Thin Films Using Aldehyde-Based Inhibitors on Nitride Surfaces
- 2023-11-22
Conference
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor-Dosed Phosphonic Acid Inhibitors Combined with Selective Lift-Off
- 2023-11-22
Conference
Growth Retardation of Atomic Layer Deposited HfO2 Thin Films Using a Surface Protector
- 2023-11-22