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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 21번부터 30번까지의 결과를 표시합니다.
2025
Conference
Effect of Wet Cleaning Chemicals on Ceria Removal and Cross-Contamination During STI Post-CMP Cleaning
- 2025-04-17
Article
Combined Effects of PVA Brush Scrubbing Parameters and Processes on Post-CMP Cross-Contamination
- Han, Kwang-Min ;
- Kumar, Sumit ;
- Khan, Mir Jalal ;
- Lee, Jae-Hyeong ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo
- 2025-04
- ECS Journal of Solid State Science and Technology
- ELECTROCHEMICAL SOC INC
Article
Azoles as corrosion inhibitors in alkaline medium for ruthenium chemical mechanical planarization applications:Electrochemical and theoretical analysis
- Dhongde, Nikhil Rahul ;
- Das, Nipu Kumar ;
- Hazarika, Jenasree ;
- Park, Jin-Goo ;
- Banerjee, Tamal ;
- 외 1명
- 2025-01
- Journal of Molecular Structure
- ELSEVIER
2024
Conference
Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning
- 2024-11-21
Conference
Effect of pH and Dissolved Oxygen Levels on the Efficiency of Corrosion Inhibitors for Molybdenum during the CMP Process
- 2024-11-14
Conference
Study on Scratch Generation during Copper Post-CMP Brush Cleaning for Sub-10 nm Semiconductor Manufacturing Devices
- 2024-11-14
Conference
Investigating the Role of Benzotriazole on Silica and Copper Ions Loading to Polyvinyl Acetal (PVA) Brush during Copper Post-CMP Cleaning
- 2024-11-13
Conference
Investigation of the Cross-Contamination Mechanism by PVA Brush Scrubbing Process and Parameters during Post-CMP Cleaning
- 2024-10-18