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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 209건 중 101번부터 110번까지의 결과를 표시합니다.
2023
Conference
Control Se Vacancy of 2D MoSe2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition
- 2023-04-13
Conference
Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition for Cu Diffusion Barrier
- 2023-04-11
Article
Phase control of two-dimensional tin sulfide compounds deposited via atomic layer deposition
- Kim, Dong Geun ;
- Lee, Ji-Min ;
- Choi, Jeong-Hun ;
- Ahn, Ji-Hoon
- 2023-03
- Applied Surface Science
- ELSEVIER
Article
Advanced atomic layer deposition (ALD): controlling the reaction kinetics and nucleation of metal thin films using electric-potential-assisted ALD
- Han, Ji Won ;
- Jin, Hyun Soo ;
- Kim, Yoon Jeong ;
- Heo, Ji Sun ;
- Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo
- 2023-03
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
Conference
Effects of Y Doping on Ferroelectric and Electrical Properties of As-deposited Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
- 2023-01-18
Conference
Rutile-TiO2 thin films deposited by Atomic Layer Deposition using thin SnO2 seed layer and Sn doping for DRAM capacitor
- 2023-01-18
Conference
Conduction Mechanism of ZrO2-based Nano-laminates Structure for Suppressing the Leakage Current
- 2023-01-18
Article
Advanced atomic layer deposition: metal oxide thin film growth using the discrete feeding method
- Park, Jae Chan ;
- Choi, Chang Ik ;
- Lee, Sang-Gil ;
- Yoo, Seung Jo ;
- Lee, Ji-Hyun ;
- ... Kim, Woo-Hee ;
- ... Ahn, Ji-Hoon ;
- ... Park, Tae Joo ;
- 외 2명
- 2023-01
- Journal of Materials Chemistry C
- ROYAL SOC CHEMISTRY
2022