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자료 필터
자료유형
발행연도
2014 ~ 2027
2014 2027
키워드
언어
전체 209건 중 51번부터 60번까지의 결과를 표시합니다.
2025
Conference
Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications
- 2025-04-18
Conference
Effects of Al Doping Position in Rutile TiO2 Thin Films Deposited via Atomic Layer Deposition
- 2025-04-18
Article
Unintended Soft Breakdown Mechanism Limiting Ultrathin Ferroelectric HZO Films Scaling
- Kho, Wonwoo ;
- Hwang, Hyunjoo ;
- Kim, Hyo-Bae ;
- Kim, Gunho ;
- Ahn, Ji-Hoon ;
- 외 1명
- 2025-04
- ACS Applied Electronic Materials
- AMER CHEMICAL SOC
Article
Molecular layer deposition of tin-based organic-inorganic hybrid films as photoresists
- 안지훈 ;
- Kim, Dong Geun ;
- Ha, Kyungryul ;
- Kim, Woo-Hee ;
- Park, Tae Joo ;
- 외 1명
- 2025-04
- Applied Surface Science
- ELSEVIER
Article
Polarization dynamics of the ferroelectric hafnium zirconium oxide thin-film capacitor during the relaxation process
- Kim, Cheol Jun ;
- Ku, Minkyung ;
- Kim, Tae Hoon ;
- Noh, Taehee ;
- Kang, Minu ;
- ... Ahn, Ji-Hoon ;
- ... Kang, Bo Soo ;
- 외 3명
- 2025-03
- Applied Physics Letters
- AIP Publishing
Article
Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications
- Jeon, Yeon-Ji ;
- Lee, Seung Won ;
- Shin, Yoonchul ;
- Kim, Ji Hwan ;
- Yoon, Chang Mo ;
- ... Ahn, Ji-Hoon
- 2025-01
- Journal of Alloys and Compounds
- ELSEVIER SCIENCE SA
2024
Conference
Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films
- 2024-11-14
Conference
Stable Ferroelectric Properties of Sub-5 nm Hafnium-Zirconium-Oxide Thin Films Deposited via Atomic Layer Deposition
- 2024-11-12