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박진구
Park, Jin Goo
ERICA 첨단융합대학
ERICA 신소재·반도체공학전공
연구분야
- (Bio-)MEMS,
- 반도체/전자재료 세정,
- 연마
자료 필터
자료유형
발행연도
1992 ~ 2027
1992 2027
키워드
언어
전체 949건 중 141번부터 150번까지의 결과를 표시합니다.
2019
Conference
The Adhesion and Removal Mechanism of Ceria Particles for STI Post-CMP Cleaning Process
- 2019-10-15
Article
Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process
- Jeong, Yeon-Ah ;
- Poddar, Maneesh Kumar ;
- Ryu, Heon-Yul ;
- Yerriboina, Nagendra Prasad ;
- Kim, Tae-Gon ;
- ... Park, Jin-Goo ;
- 외 6명
- 2019-10
- Microelectronic Engineering
- ELSEVIER
Conference
Investigation of Chemical Induced PVA Brush Deformation by Accelerated Brush Scrubbing Method
- 2019-09-17
Conference
Investigation of Corrosion Inhibitor Related Particle Contamination on Post Cu CMP Surface
- 2019-09-17
Conference
Quantitative comparison of silica and ceria abrasive contamination on PVA brush and its effect on post CMP cleaning process
- 2019-09-17